Modeling & Analysis of Semiconductor Manufacturing II

MC09.1 Matching Factory Lots to Customer Orders Kraig Knutson, Karl Kempf, John W. Fowler --- AZ State Univ., Dept. of IMSE, Tempe, AZ 85287-5906, (kraig.knutson@asu.edu)

Present methods of matching factory lots to customer orders result¨ in inefficient factory loading, increased cycle time and in excess¨ finished goods inventory. Using simulation and design of experiments¨ methods, we study how various sizes of lots and orders and matching¨ policies affect plant profitability. Plant profitability is measured¨ in excess finished goods inventory and on-time delivery of orders.

MC09.2 Simulation Evaluation of Reticle Management in Photolithography Matt Hickie, John W. Fowler --- Motorola - MOS 12, 1300 N Alma School Rd., Chandler, AZ 85224 , (matt_hickie@chdqm2.sps.mot.com)

Photolithography performance is not only dependent upon the stepper¨ being available, but also upon the availability of reticles. We¨ present the strategic, tactical and operational aspects of reticle¨ management. Strategically, decisions must be made to purchase extra¨ reticles. Tactically, reticle storage and dispersion among the¨ equipment is analyzed. Operationally, what material to run on which¨ piece of equipment is considered.

MC09.3 Test Wafer Opportunities for Cost Reduction Doron Meyersdorf, Ertunga C. Ozelkan --- TEFEN USA, 1065 E Hillsdale Blvd., Ste. 400, Foster City, CA 94404-1615, (doron@tefen.com)

After defining the problems associated with TWs and TW management, a¨ LP-based TW-controller is developed to obtain optimal TW decision¨ policies. The model provides management with vital information on¨ how many TWs to be purchased, downgraded, repolished, reused and/or¨ reworked at each level of semiconductor production process in each¨ time period.