Modeling and Analysis of Semiconductor Manufacturing

16th International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) 2020

Orlando, Florida
December 13-16, 2020

MASM Keynote

Chen-Fu Chien, Ph.D.
Tsinghua Chair Professor & Micron Chair Professor
Department of Industrial Engineering & Engineering Management
National Tsing Hua University, Hsinchu 30013, Taiwan

The 2020 International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) aims to again be a forum for the exchange of ideas and industrial innovations between researchers and practitioners from around the world involved in modeling and analysis of complex high-tech manufacturing systems. We are convinced of the worth and importance of the continuation of the MASM events held in Tempe, Arizona in 2000 and 2002, Singapore in 2005, Miami, Florida in 2008, Austin, Texas in 2009, Baltimore, Maryland in 2010, Phoenix, Arizona in 2011, Berlin, Germany in 2012, Washington, DC in 2013, Savannah, Georgia in 2014, Huntington Beach, California in 2015, Washington, DC in 2016, Las Vegas, Nevada in 2017, Gothenburg, Sweden in 2018, National Harbor, Maryland in 2019.

The MASM 2020 conference will be fully contained within the Winter Simulation Conference 2020 (WSC 2020), the leading conference in discrete-event simulation. However, MASM 2020 covers a much wider range of techniques and approaches than simulation (e.g. optimization, scheduling, queueing theory, process control, data analysis, machine learning). WSC 2020 features a comprehensive program ranging from introductory tutorials to state-of-the-art research and practice. WSC 2020 will take place in Orlando, Florida. All attendees of the MASM conference will register for WSC 2020 at the same cost. All participants of WSC 2020 can attend MASM 2020 sessions.

We are looking for high-quality academic and applied research at all levels of semiconductor manufacturing.

  • At the equipment and process level, we would like to cover various aspects of Equipment Maintenance and Productivity, Quality and Advanced Process Control (Statistical Process Control, Fault Detection and Classification, Run To Run, Virtual Metrology, …), but also how to handle and exploit the huge amount of data generated in semiconductor factories (big data). We are interested in having presen­tations from leading semiconductor equipment manufacturers.
  • At the shop-floor level, optimized WIP management, dispatching, scheduling and sampling of lots or qualification management of products on machines remain critical in particular when handling new complex constraints.
  • At the factory level, it is important to develop efficient transportation and storage policies, production and capacity planning approaches, as well as cycle time improvements and time-to-market reductions.
  • At the strategic level, demand planning, factory economics and cost modeling, new pro­duct introduction, and supply chain efficiency are important topics to support the business.

We invite participants to present on all topics related to modeling and analysis that will help address these challenges. We also welcome contributions that integrate decisions or information at different decision levels, which is becoming a must. These various goals will be attained through new advanced control and statistical methods, novel computing techniques, methods from artificial intelligence, and operations research methods. While the MASM conference is mostly focused on the current semiconductor industry state-of-the-art, neither presenters nor attendees need to be in the IC industry to participate. We are interested in methodologies, research and/or applications from other related industries such as TFT-LCD, flexible displays, bio-chip, solid state lighting (LED), and photovoltaic (PV) that might also share or want to share common and new practices.

Authors of high-quality submissions will have the opportunity to submit consi­derably extended versions of their MASM contributions to IEEE Transactions on Semiconductor Manufacturing.

The conference includes tutorials and related software demonstrations within the Winter Simulation Conference 2020. A broad range of papers is sought, including theoretical developments, applied research, and case studies. Interested individuals within academia, government agencies, equipment suppliers, manufacturers, students, contractors, and other interested parties are encouraged to participate.

MASM 2020 will feature a keynote talk by Professor Chen-Fu Chien who is the Tsinghua Chair Professor & Micron Chair Professor in the Department of Industrial Engineering & Engineering Management at National Tsing Hua University in Taiwan.

Conference Organizers

John W. Fowler, Arizona State University, USA
Michael Hassoun, Ariel University, Israel
Lars Mönch, University of Hagen, Germany

International Program Committee (to be confirmed)

Jakey Blue, National Taiwan University, Taiwan
Chen-Fu Chien, National Tsing-Hua University, Taiwan
You-In Choung, SK Hynix, Republic of Korea
Stéphane Dauzère-Pérès, Ecole des Mines de Saint-Etienne, France
Hans Ehm, Infineon, Germany
Ken Fordyce, Arkieva, USA
Cathal Heavey, University of Limerick, Republic of Ireland
Jesus Jimenez, Texas State University, USA
Myoungsoo (Andy) Ham, Liberty University, USA
Baris Kacar, SAS, USA
Adar Kalir, Intel, Israel
Hyun-Jung Kim, KAIST, Republic of Korea
Andreas Klemmt, Infineon, Germany
Tae-Eog Lee, KAIST, Republic of Korea
Peter Lendermann, D-SIMLAB, Singapore
John Milne, Clarkson University, USA
James Morrison, Central Michigan University, USA
Irfan Ovacik, Intel, USA
Detlef Pabst, Global Foundries, USA
Thomas Ponsignon, Infineon, Germany
Oliver Rose, Universität der Bunderwehr München, Germany
Ralf Sprenger, Infineon, Germany
Marcel Stehli, Global Foundries, Germany
Gian Antonio Susto, University of Padova, Italy
Reha Uzsoy, North Carolina State University, USA
Kan Wu, Nanyang Technological University, Singapore
Jei-Zheng Wu, Soochow University Taipei, Taiwan
Claude Yugma, Ecole de Mines de Saint-Etienne, France

Paper Submission

Please follow the WSC 2020 Author Kit to prepare your MASM 2020 paper at

Important Dates

Deadline for Paper Submission: April 3

Notification of Acceptance: May 29

Camera Ready Paper due: June 30

Conference Location

MASM 2020 will be held in Orlando, Florida December 8-11, 2020. The Orlando World Center Marriott is the host hotel for WSC 2020. Please check the web site to get more information and reserve rooms at conference rates.

Please visit the WSC 2020 website at for updated information.